Site-specific plan-view TEM lamella preparation of pristine surfaces with a large field of view

Transmission electron microscopy has become a major characterisation tool with an ever increasing variety of methods being applied in wide range scientific fields. However, the probably most famous pitfall related workflows is preparation high-quality electron-transparent lamellae enabling for extraction valuable and reliable information. Particularly field solid state physics materials science, it often required to study surface macroscopic specimen plan-view orientation. Nevertheless, despite tremendous advances instrumentation, i.e. focused ion beam, yield existing techniques relatively low compared cross-sectional methods. Furthermore, relying on mechanical treatments, conventional preparation, compromise site-specifity. In this paper, we demonstrate that by combining grinding step prior backside lift-out beam becomes increasingly easy. The suggested strategy combines site-specifity micrometer precision as well possible investigation pristine surfaces view several hundred square micrometers.